Sr. Mechanical Engineering Manager — Vacuum Systems

In this role, you will play a key part in advancing business priorities by delivering high-impact work across your area of expertise.

Job Description

The Advanced Technology of RAPID Division is seeking a Senior Mechanical Engineering Manager to lead mechanical development for next-generation EUV light source in the cutting-edge reticle inspection products. This role leads a multidisciplinary mechanical team delivering precision hardware operating in extreme environments including high vacuum, high-power laser, thermal transients, precision opto-mechanics, and precision motion mechanisms.

• ◆Lead and develop a high-performing mechanical engineering team; set technical direction, priorities, and execution plans to deliver on schedule, cost, and quality.
• ◆Own mechanical system architecture and delivery for EUV source subsystems including: vacuum chambers and ultra-clean/UHV-compatible hardware; laser/mechanical integration and beam delivery mechanical packaging; collector mirror mounting/alignment mechanisms; plasma target delivery hardware; precision motion components; gas delivery mechanical interfaces; thermal management and structural dynamics.
• ◆Drive rigorous design review and release discipline, including

definition, tolerance analysis, validation/qualification planning, and documentation quality.

• ✓Partner closely with Technology, Optics, Systems, Production Development, Machine Controls, Manufacturing and Service organizations to improve cost, performance, manufacturability, reliability, and serviceability.
• ✓Lead root-cause analysis and corrective actions for complex subsystem issues; implement design improvements that increase availability and uptime.
• ✓Manage supplier technical engagement for precision parts and subassemblies, including vendor selection, qualification, and issue resolution.
• ✓Embed safety-by-design into mechanical solutions and enable people/machine safety service/production tooling (jigs, fixtures, alignment tools, handling/lifting concepts).
• ✓Occasional domestic/international travels may be required to support build/validation and customer-site readiness.

• ✓Experience with EUV-adjacent source or illumination subsystems, high-power laser-integrated hardware, or precision opto-mechanical alignment systems.
• ✓Experience with cryogenic mechanisms and vacuum feedthroughs/seals designed for reliability and maintainability.
• ✓Track record of production transfer and sustaining engineering support (tooling, procedures, and field escalation readiness).

• ✓B.S. in Mechanical Engineering (M.S. preferred) or equivalent related discipline.
• ✓10+ years of experience developing complex hardware/capital equipment (semiconductor tools, precision vacuum systems, opto-mechanical equipment, aerospace-grade mechanisms, or similar).
• ✓5+ years of people management experience leading engineers through concept-to-release development.
• ✓Demonstrated expertise in multiple of: vacuum/UHV design, precision mechanisms, rotating machinery/air bearings, thermal-structural design, vibration/dynamics, contamination-aware mechanical design, and design-for-manufacturability/serviceability.
• ✓Strong cross-functional communication and leadership skills; ability to drive alignment across technical stakeholders and suppliers.

About KLA

We provide advanced inspection tools, metrology systems, process solutions, and computational analytics that make electronics possible, tackling complex challenges. From electron and photon optics to machine learning and data analytics, we seek perfection at the most fundamental level of matter in the universe. If you want to make electronics that push industries forward and make the world a better place, join us.

Total Rewards

Primary Location: USA-CA-Milpitas-KLA

KLA’s total rewards package for employees may also include participation in performance incentive programs and eligibility for additional benefits including but not limited to: medical, dental, vision, life, and other voluntary benefits, 401(K) including company matching, employee stock purchase program (ESPP), student debt assistance, tuition reimbursement program, development and career growth opportunities and programs, financial planning benefits, wellness benefits including an employee assistance program (EAP), paid time off and paid company holidays, and family care and bonding leave.

Interns are eligible for some of the benefits listed. Our pay ranges are determined by role, level, and location. The range displayed reflects the pay for this position in the p